Radio Frequency Glow Discharge ( Rfgd ) Treatment

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1.3 Radio Frequency Glow Discharge (RFGD) Treatment
A typical Radio Frequency Glow Discharge (RFGD) device consists of a chamber filled with dilute gas (e.g. Oxygen/ Air, Carbon Tetrafluoride or Argon), and a coil wrapped around the chamber that gives the voltage needed to excite the gas (Figure 1.3). The gas in the chamber ionizes (i.e. becoming a plasma) when the voltage hits the striking voltage and starts conducting electricity, causing it to glow. The color depends on the gas used. The RFGD treatment involves the removal of impurities and weakly bound organic contamination from surfaces through the use of the energetic plasma created from gaseous species. The device is connected to a vacuum to remove all atmospheric contaminants and debris produced throughout the process. RFGD can treat a wide-range of materials as well as surfaces with high level of roughness and different geometries. It can be applied to samples that are electrically conductive or non-conductive, whether bulk solids or layered materials. It is very important that the RFGD has his ability, which expands the use of analytical methods that are based on the use of the glow-discharge.

Figure 1.3 – A simple RFGD treatment device. Before Treatment (left), during treatment (right). (308 Squire Hall, SUNY UB 2016)
Plasma Treatment
Plasma, one of the four fundamental states of matter, exists in the form of ions and electrons. Basically, plasma is any ionized gas that has extra electrons. Plasma is electrically conductive because of the presence of charge carries. Moreover, plasma acts like a gas; no definite shape or a definite volume. Plasma is abundant in the universe; natural occurrences are seen in lighting and the Aurora Borealis (northern ligh...

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...ettability, sanitized, and ready for further processing. During this process, light is emitted (discharged) by the excited gas molecules and atoms in the plasma. As the atoms and molecules “relax” to their normal, lower energy states they release photons of light. This is what causes plasma to "glow". Treatment generally takes only about two to three minutes. Using a different gas can provide a different outcome. For example, treating with carbon tetrafluoride (CF4) plasma forms hydrophobic coatings of fluorine-containing groups (CF, CF2, CF3) and decreases the number of hydrophilic polar end groups on surfaces; this decreases surface wettability.

Figure 1.4 – Schematic of cleaning of a substratum using plasma glow discharge. Note the removal of adsorbed molecules by bombardment on the surface and the presence of dangling bonds (Wikipedia – the Free Encyclopedia).

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