Synthesis of Carbon Nanotubes at Low Temperatures Using Single Heating Source of Catalyst and Reactor in the Floating Catalyst Chemical Vapor Depositi

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Abstract Synthesis of carbon nanotubes at low temperatures as low as 540oC was demonstrated via floating catalyst chemical vapor deposition method. Catalytic decomposition of benzene was employed using ferrocene as a catalyst precursor. In this work, the issue of introducing catalyst particles into the reactor has been developed by using single heating source for both the catalyst and reactor. In-situ monitoring device was used to observe the temperature profile in the reactor and thus, to initiate the reaction. CNTs with both types (aligned and entangled) were synthesized with diameter distribution ranging from 10 to 40 nm. This new technique would contribute with the synthesis of carbon nanotubes for microelectronic applications since it offers relatively low synthesis temperature.

Introduction:

Since their first discovery in 1991 (Iijima, 1991), carbon nanotubes attracted much attention due to nanoscale dimensions and promising shape as well as their potential properties. Many methods for the synthesis of CNTs have been used and developed (Ajayan, 1992; Ishigami et al., 2000; Lee et al., 2002). Among all synthesis methods, chemical vapor deposition (CVD) is widely used to due to its efficient cost and low operating temperatures required (Shyu et al.,2001; Han et al., 2003; Ni et al., 2006). Depending on the way of introducing the metal catalyst into the reactor, the CVD method can be conducted via supporting catalyst or floating catalyst technique. Floating catalyst method (FC-CVD) has gained much popularity due to its simplicity and the purification step is not required to recover CNTs from the substrate. In addition, direct product collection from the effluent and the absence of support material further reduce the amount ...

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