Progress and challenges in the design of MEMS Resonators

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In a modern VLSI design aims to design a on chip components with low power, High Speed and with reduced size. All components in a digital designs like flip flops, counters need of frequency references and frequency sources. A Resonator will fulfil these requirements. We design and analysed a novel three types resonators as follows Temperature Compensated Resonator, Comb Drive Resonator, Piezoelectric Resonator. The design and analysis are all done in FEM (Finite Element Method) analysis tool.

Keywords—Microelectromechanical system, resonators, comb drive, piezoelectric.
The quartz crystal resonator has been replaced by MEMS resonator in last few decades. A MEMS Resonator having a good power consumption and it has an ability design a mixer-filter in a single chip without any off chip components. However the Resonator performance in terms of resonant frequency will get affected due to temperature variation. This temperature variation will compensate by adding positive temperature compensated material in Resonator body itself [1].The advantage of the comb resonator is providing good linearity under small deflections [3]. Comb drive micro resonator used in many applications like gyros, clocks, filters and sensors. In an accelerometer based resonator measures acceleration by change in resonant frequency [2]. For a batch fabrication like CMOS-MEMS Resonator the total weight of combinational component should low without degrading from its design parameters. The piezoelectric Resonator provides good stability and temperature stability in all case of temperature variation [6]. Piezoelectric Resonators provides low damping of single crystal silicon.

Resonator Introduction
The innovation of MEMS resonator is for low impedance ...

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...spect to the applied voltage.[19]
When this voltage level exceeds a particular value the piezoelectric structure will tends to vibrate. At particular level the resonant condition occurred in piezoelectric material.
The structure of piezoelectric resonator in comsol multiphysics is shown in Fig 17. The material properties are shown in table 6. Bottom layer as a silicon substrate, the electrodes are used as a Aluminum and piezoelectric layer as a Zno.

Table 4: Device specification of piezoelectric resonator

Parameter Dimension
Aluminum Electrode (thick) 0.2 um
Aluminum Electrode (Width) 500 um
Zno 9.5um
Silicon substrate 7 um

Table 5: Material properties of piezoelectric resonator

Materials Density
(kg/m3) Elasticity matrix (GPa) Youngs modulus (Pa)
Silicon 2330 166 70
Aluminum 2700 NA NA
Zno 5680 2.0974e-14 NA

Measurement and analysis
Conclusion and future work

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