Essay On MEMS

In 21st century, there is growing interest to minimize the size and the power consumption of any electronic device. There are many technologies introduced but the most optimistic technology is identified as MEMS.

1.1.1 MEMS: An Introduction

MEMS is known as Micro Electro Mechanical System. It is also known as micro system technology (MST) in Europe and micro system in Japan. It is process technology used to generate micro level integrated system or devices that have combination of mechanical and electrical components. Generalized definition of MEMS can be given as “It is device where micro sensor and mechanical parts (Actuators) along with signal processing circuitry are combined on very tiny piece of silicon.” MEMS components generally have micron level dimensioned part, with a moving element which may be solid mechanics type or may fluid one, integrated with some electronic circuit. MEMS is produced using lithography and etching techniques. Besides silicon as substrate other materials like, quartz, glass and plastic are also used as substrate in MEMS devices [1]. Many machines can be built at the same time on the surface of the wafer, without any assembly that is real power of MEMS technology.

MEMS is combination of three basic blocks named as sensor, processor and actuator. Sensor or micro sensor is first block which senses the measurand or input signal. Most of time input is probably non - electrical signal which converts into electrical signal. Non electrical signals may be different possible signals like, thermal, radiation, mechanical, magnetic, optical or bio (chemical). All signals must be converted into electrical signal by sensor using available possible methods of conversion. The basic work with of sensor is shown w...

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...ing micro mirror arrays. There is another product named thermally operated inkjet print head that remain a high demand application till date.

A micro-optics as an accompaniment to optical fiber communication - by way of all optical related devices and optical switches is the third generation of MEMS commercialization [5]. And the fourth wave of the commercialization could be other applications that may include biological and neural probes, also called lab-on-chip drug development and biochemical system and macroscale drug delivery system. E-nose is also the latest application that comes under fourth generation of MEMS commercialization.

1.1.3 MEMS Materials

MEMS technology may be implemented using different manufacturing techniques and different materials that are totally depend on the device which is being created and the market in which it has to operate [6].