Mirco-Electro- Mechanical Systems (MEMS)

I. INTRODUCTION
Micro-Electro-Mechanical Systems (MEMS) is technology related to mechanical and electro-mechanical devices on the micro scale [1]. In 1959, Richard Feynman introduced the idea of the fabrication of small devices in a lecture entitled “There’s Plenty of Room at the Bottom.” Feynman believed small device fabrication was possible by atom and molecule manipulation. In 1974, Japanese scientist Norio Taniguchi defined “nanotechnology” as “the processing, separation, consolidation, and deformation of materials by one atom or one molecule” [2]. MEMS technology differs from nanotechnology in that MEMS elements must have some sort of mechanical component or functionality, and in that MEMS elements are made using microfabrication techniques, as opposed to the single atom and molecule build up method [1].
A major strength of MEMS technology is that it is very diverse, in that it can create a wide variety of devices. Many MEMS elements can be used as transducers, devices which convert energy from one form to another. MEMS devices can have a wide variety of use on both the micro and macro scales, and are used quite commonly in many everyday devices. There are some limitations on MEMS technology, but they are all considered in the design process of MEMS devices. MEMS is an important technology with broad application and high potential [1].
II. FUNDAMENTALS
The design of a specific MEMS device is based on what the device is intended to do. MEMS devices are produced using low cost batch microfabrication techniques on silicon, much like integrated circuits (ICs). The microfabrication process starts with a deposition of barrier films, usually composed of silicon dioxide, on a silicon substrate wafer. Next, photolithography is done. ...

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...phones, but together can be applied to complex systems such as navigational systems. There are also other applications for MEMS in the fields of communications in RFMEMS and biotechnology in BioMEMS.
Although MEMS devices have a variety of applications, there are limits to the technology that must be considered, such as the difficulty of shrinking MEMS devices any further, the fact that the microfabrication processes for MEMS and ICs differ enough that they must still be manufactured and implemented separately, and the wide variation in the MEMS microfabrication process.
Electrical and Computer Engineers have the responsibility of designing both the MEMS devices and the integrated circuits that connect them, while dealing with limitations. Even with these limitations, MEMS technology is still very diverse and is widely applicable to a variety of devices and systems.