Microelectromechanical Systems Essay

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Microelectromechanical Systems (MEMS) are systems that are designed on a micro metre scale and have become more popular as the demand for devices to get smaller has increased. The main uses of these systems are for sensors, such as accelerometers and gyroscopes and other such devices like microscopy and inkjet nozzles for example. There are many materials that can be used for MEMS as the cost of the material is almost eradicated due to the micro size of the systems being produced. This brings materials such as gold, platinum and diamond can be used, as these materials have some properties which are very desirable for a MEM systems. The most common material that is currently used in MEMS is silicon and silicon based compounds as they possess many good properties for MEMS production. Most of the materials chosen for MEMS are semiconductor materials Figure 1 shows the properties of commonly used materials.

Now that the important have been shown we can now compare the values that the current materials and diamond have to examine where diamond would be a suitable material to use.
Diamond is a material that has been closely looked at over recent years as a lot of its properties are desirable in mechanicals systems. Because of these diamond is a leading material for MEMS applications in harsh conditions , as it one of the hardest natural materials. As Figure 2 shows both amorphous and crystalline diamond possess much higher elastic moduli and hardness properties than most other MEMS manufacturing materials. This means that diamond is a good material choice for high-wear environments.

The elastic modulus of even amorphous diamond is around 800 GPa which is already much higher than any other MEMS material that is currently ...

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...C will provide a chemically inert surface in the same environments in which SiC would be affected.
The large electronic bandgap (around 5.5eV) is well suited for stable high temperature applications. This is because as the temperature of the system increases the bandgap decreases, so because of the large starting value of diamond the band gap will still be wider than that of silicon and other such substances at high temperatures. This bandgap can be linked into the a corresponding wavelength of 225nm which means that diamonds can only absorb the far end of ultraviolet and vacuum ultraviolet (VUV) radiation. This leads to DLC films being considered as solar insensitive which allows them to absorb high VUV intensities while remaining reliable throughout. This allows them to be used in laser power monitors, for UV detection in the next generation of photolithography .

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