1.
Three MEMS devices described below are:
I. Eco Scan MEMS resonant mirror: MEMS resonant mirror devices have the potential to miniaturize optical systems, such as sensors, displays and printing devices. They integrate the driving actuator into the mirror structure, a small, low power consumption and inexpensive device. The Eco scan MEMS resonant mirror uses the electromagnetic drive method. On a single crystal silicon substrate, a mirror, torsion bars and coils are formed and permanent magnets are placed on the periphery of those parts. In the magnetic field of the permanent magnets, when current is applied to the coil, Lorentz force is generated on the coil and thereby the mirror tilts to the position where the rotational torque of the coil is balanced by the restoring forces of the torsion bars. Lorentz force is proportional to the current by changing the intensity of the current the tilt angle of the mirror can be changed. With alternating current matching to the resonant frequency large amplitude of current obtained with low power consumption. [1]
II. Capacitive type gyro sensor: A capacitive type gyro sensor is a second generation ring vibrating gyro which consists of a glass-silicon-glass structure with silicon bulk micromachining. Capacitive transducer for the drive and detection is implemented by electrodes arranged in the oscillation plane and fabricated by a wafer process using planar photolithography and DRIE (Deep reactive-ion etching).The resonator of the sensor is made from single-crystal silicon wafer which is kept in vacuum package. [1]
III. MEMS variable optical attenuator: The variable optical attenuator (VOA) is an indispensable component in fiber-optic communication network systems. Large numbers of VOA c...
... middle of paper ...
...s in periodic table.
Phosphorus and Arsenic are two dopants used to create n-doped silicon. These dopants are group 5 elements in periodic table.
10.
I. IC Fabrication
Deposition
Lithography
Removal
II. Bulk micromachining
Crystal planes
Anisotropic etching
Deep Reactive Ion Etching
III. Surface micromachining
Sacrificial etching
Molding
Bonding
References:
1. Text book, Reliability of MEMS by O.Tabata and T.Tsuchiya
2. http://courses.ece.ubc.ca/300/handouts/EECE300-2011-scaling.pdf
3. http://ammtiac.alionscience.com/pdf/2004MaterialEASE28.pdf
4. https://myasucourses.asu.edu/bbcswebdav/pid-9027529-dt-content-rid- 33636657_1/courses/2014Spring-T-EEE528-17052/class2.pdf 5. Text book, MEMS and Microsystems: Design and Manufacture by Tai-Ran Hsu.
6. Text book, T.M. Adams, R.A. Layton, Introductory MEMS: Fabrication and Applications.
Some of the important features of the fiber optics that we are interested are discussed below.
In 1940’s, two Russian scientist, B. R. Lazarenko and N. I. Lazarenko are the first researchers who applied the process on a machine to remove material by controlled erosion through a series of sparks. The couple invented a simple servo controller to make the EDM process more cost-effective by maintaining the gap between two conductors in dielectric liquid that helps in reducing the arcing. The developed controller was the relaxation or RC circuit where it used to be called as the Lazarenko’s circuit. This type of controller is still being used until today in some of the EDM machines in order to obtain near-mirror finish structures. The first EDM machine was manufactured by the “Charmilles” in 1952 for commercial use, where later was presented in the European Machine Tool Exhibition in 1955. “Agie” and “Seibu” are among the first companies that developed the wire EDM machine in 1969 and 1972 respectively. Kurafuji and Masuzawa are the first researchers who applied EDM in micro scale by drilling a hole in a 50 µm thick carbide plate
Discrete SAW resonators suffer from lossy interfacing and consume large area [4]. In this work, SAW resonator was developed ZnO piezoelectric material on silicon [2] to enable integration of the SAW resonator with the integrated circuits. The resonator’s IDTs were formed using metal layers present in standard 0.35 μm CMOS process to realize a 1 GHz resonator. The important parameters that affect the performance of the SAW resonator are the electromechanical coupling coefficient, k2, high quality factor, Q and low insertion loss. This paper studies the effect of different ZnO piezoelectric thickness and different distance of input and output transducer, Lc to the electromechanical coupling coefficient of the SAW resonator. Finite element simulations of the ZnO SAW resonator were conducted using COMSOLTM. A 2D geometry of SAW resonator was drawn under the piezoelectric model. Two analyses were applied: eigen frequency analysis, frequency domain analysis. A harmonic excitation was applied as sinusoidal wavefor...
The casing part of the sensor is attached to the robot wrist and the moving part is attached to the tool side. When used the tool, the sensor reads the distance that the moving part has moved from the casing, depending on the amplitude of the movement of the sensor, the sensor send the output signal to the computer. The measurement is digital signal from the start making a very clean signal, less noise and protect to external electromagnetic noise.
It is by-product of silicon industry and contains very large amounts of amorphous silicondioxide (about 90%). (ACI-116R)[1]
PDMS MEMS machining techniques are used to fabricate them. Before we talk about manufacturing we will give you a brief theoretical discussion of material selection, rotor dimension calculation and thermal analysis.
Section 1 will introduce an overview about the architecture of this microprocessor and its functional blocks. The processing states of the microprocessor are described in section 2. Section 3 refers briefly to programming model - data registers, data format. For instruction set list, please refer to the source of information at the end of this document.
The spring system is used as the suspension in our prototype. The compressive and expansive force stresses over the piezoelectric crystal which deforms the crystal and generates electricity. This electricity generated will be combined with the electricity generated for the electrical purposes.
only would it be easier to access, but the CPU would also be able to
As a graduate student, I will undertake research and coursework in Electrical Engineering to enhance my competencies in this field. I intend to complete my master's degree in order to pursue my doctorate. The research that I am most interested in pursuing at Northeastern University surrounds the optical properties of MEMS devices, and the development of substrate-based fast electro-optical interfaces. My interest in this area stems from my undergraduate study in MEMs development for tri-axial accelerometers.
Yao, S. (2003). Polarization in Fiber Systems: Squeezing Out More Bandwidth. The Photonics Handbook, Laurin Publishing
The topic of magnetic disks is one that involves many physics related phenomenon. The intricate structure and design of “Magnetic Disks” (or hard disks) in computers include the principles of Fluid Flow, Rotational Motion, Electromagnetism, and more. This paper will focus mainly on the previously listed physics occurrences, and the design that goes into engineering the magnetic disk to include them. These physics principles are utilized in such a way that makes the hard disk a very common and useful tool, in this day and age. To most people, the magnetic disk is the most important, yet most mysterious, part of a computer system. A hard disk is a seal unit that holds computer data in the form of magnetic patterns.
Elemental Semiconductors: These are single elemental semiconductors belong to B subgroups III, IV, V and VI groups of the periodic table. Carbon (diamond) Silicon, Boron, Gray tin, Phosphorous, Germanium, Selenium, and Tellurium are some of the elemental semiconductors.
Beginning with a passing interest in EE, these years of in-depth study have convinced me that my future lies in microelectronics. I believe that I possess the motivation, the intellectual ability, and the preparation to set out on this exhilarating and arduous path, to do justice to a demanding Graduate program.
Reflecting telescopes use mirrors instead of lenses to magnify an image. the light enters the telescope straight and hits the concave mirror and bends towards the focal point. A plane mirror is placed near the focal point and angled so the light bends towards the eyepiece underneath it. The eyepiece is a converging lense which bends the light and straightens the light so it goes into the eye