I. INTRODUCTION Micro-Electro-Mechanical Systems (MEMS) is technology related to mechanical and electro-mechanical devices on the micro scale [1]. In 1959, Richard Feynman introduced the idea of the fabrication of small devices in a lecture entitled “There’s Plenty of Room at the Bottom.” Feynman believed small device fabrication was possible by atom and molecule manipulation. In 1974, Japanese scientist Norio Taniguchi defined “nanotechnology” as “the processing, separation, consolidation, and deformation of materials by one atom or one molecule” [2]. MEMS technology differs from nanotechnology in that MEMS elements must have some sort of mechanical component or functionality, and in that MEMS elements are made using microfabrication techniques, as opposed to the single atom and molecule build up method [1]. A major strength of MEMS technology is that it is very diverse, in that it can create a wide variety of devices. Many MEMS elements can be used as transducers, devices which convert energy from one form to another. MEMS devices can have a wide variety of use on both the micro and macro scales, and are used quite commonly in many everyday devices. There are some limitations on MEMS technology, but they are all considered in the design process of MEMS devices. MEMS is an important technology with broad application and high potential [1]. II. FUNDAMENTALS The design of a specific MEMS device is based on what the device is intended to do. MEMS devices are produced using low cost batch microfabrication techniques on silicon, much like integrated circuits (ICs). The microfabrication process starts with a deposition of barrier films, usually composed of silicon dioxide, on a silicon substrate wafer. Next, photolithography is done. ... ... middle of paper ... ...phones, but together can be applied to complex systems such as navigational systems. There are also other applications for MEMS in the fields of communications in RFMEMS and biotechnology in BioMEMS. Although MEMS devices have a variety of applications, there are limits to the technology that must be considered, such as the difficulty of shrinking MEMS devices any further, the fact that the microfabrication processes for MEMS and ICs differ enough that they must still be manufactured and implemented separately, and the wide variation in the MEMS microfabrication process. Electrical and Computer Engineers have the responsibility of designing both the MEMS devices and the integrated circuits that connect them, while dealing with limitations. Even with these limitations, MEMS technology is still very diverse and is widely applicable to a variety of devices and systems.
The small size ranging from 0.1 to 10 micrometres of nanobots make it difficult to be constructed. The process of working atom by atom and molecule by molecule is monotonous work and the miniaturization of synthetic mechanisms to a nanoscale will only be achievable with the advancement of research in metallurgy.
In basic research, special model systems are needed for quantitative investigations of the relevant and fundamental processes in thin film materials science. In particular, these model systems enable the investigation of i.e. nucleation and growth processes, solid state reactions, the thermal and mechanical stability of thin film systems and phase boundaries. Results of combined experimental and theoretical investigations are a prerequisite for the development of new thin film systems and tailoring of their microstructure and performance.
The rapid progress of embedded MEMS (micro-sensing technologies) and wireless communication has made wireless sensor networks possible. Such an environment may have many wireless nodes which are inexpensive; each node is capable of collecting, storing and processing environmental data, and communicating with neighboring nodes. These sensors are connected with wires in the past but tod...
Nanotechnology is defined as “ a technology executed on the scale of less than 100 nanometers, the goal of which is to control individual atoms and molecules, especially to create computer chips and other microscopic devices” (Webster’s Dictionary, 1999). In the early 1970’s an MIT student by the name of K. Eric Drexler came up with the idea of manufacturing things, both biological and non-biological, from the molecular level up. Drexler noticed the amazing talents of natural biology and wondered if humans could mimic biology on a mechanical level,
“After the integrated circuits the only place to go was down—in size that it. Large scale integration (LS) could fit hundreds of components onto one chip. By the 1980’s, very large scale integration (VLSI) squeezed hundreds of thousands of components onto a chip. Ultra-Large scale integration (ULSI) increased that number into millions. The ability to fit so much onto an area about half the size of ...
There are number of methods to fabricate MEMS like silicon surface micromachining, silicon bulk machining, electro discharge machining, LIGA (in German, Lithographie, Galvanoformung(Electro Plating), Abformung(Injection Moulding)) .Only silicon surface micromachining is discussed here.
Basic Mathematics for Electronics seventh edition: Nelson M. Cooke, Herbert F.R Adams, Peter B. Dell, T. Adair Moore; Copyright 1960
Mechanochemical processes are simple, low-cost technology and environmental and the Planetary Ball Mill machine is used in this mechanochemical process. This Ball Mill machine performs as a grinding by rotating the balls and the materials inside the containers. Collision of ball can make the energy transfer from each of the ball to the sample material inside the closed container. As a result, the particle of sample size decreases due to the surface energy increase. The sample size will change and the chemical reactions also will happen in the materials where the mechanochemical reactions are happened in this stage (Hao Wu & Qiang Li, 2012). In this research, mechanical milling is being used because it refers to the milling of pure metals and compounds (P.G.McCormick & F.H.Froes,
Microcontrollers are more economically viable to digitally control more devices and processes than designs that operate using isolated memory, microprocessors and input/output devices. The cost and size also make the microcontroller more feasible. Mixed signal microcontrollers are common, as it integrates analog components needed to control non-digital electronic systems.
Direct write laser micromachining is illustrated in figure 3a. In direct write laser micromachining process, the laser beam is focused to a small spot using a lens and either the beam or the sample (or both) are moved around to produce the desired pattern. Generally this process uses a laser with a Gaussian beam profile. Because of the good beam quality and a low M2 factor, it allows the beam to be focused to a small spot using simple optical components and give the beam fluence at focus that is above the ablation threshold of the workpiece material.
The contribution of engineering including all branches are now undoubtedly keys to glories, enhancement over every respect and enlightened human. Electrical and electronic engineering is one of the dominating engineering branches. Most of the control systems, communication instruments, industrial equipment etc, are without application of electrical and electronic technology can not be surmised. But least developing countries like us have lack of knowledge and amenities to meet the engineering needs especially for want of adequate research facilities like those of modern countries.
Dockery, Gabriel. “How Are Microprocessors Made.” eHow. eHow Inc., n.d. Web. 11 Feb. 2011. .
After I went to Huazhong University of Science and Technology to study materials processing and control engineering, I became interested in various advanced manufacturing and processing techniques especially the Selective Laser Sintering (SLS), which could easily make complex geometries directly from digital CAD data. Because of my excellent performance and great enthusiasm, Prof. Yusheng Shi, a leading expert in addictive manufacturing, accepted my application to join his laboratory when I was a sophomore. I teamed up with four senior students, aiming to improve the system of selective laser sintering. We designed CAD models and made theoretic analysis. Working with senior students and graduates improved both my practical and theoretical skills, like operating of instruments and equipments, and fundamental theory of laser processing. Meanwhile I noticed that in many cases macroscopic properties were linked to microstructure. Thus understanding the effect of microstructure on the time evolution, response, and reliability of material properties was important. A lack of the relevant knowledge intrigued me to consider learning mor...
Also, micro machining was performed on the substrate to improve the part’s feature resolution (cavities for electrical components and channels for the inks).
Ever since I was in school I would see the electronic gadgets like mobile phones, washing machine and TV this is what triggered my fascination for electronics. The powers they yielded always amazed me. Consequently I decided to attain my Bachelors degree in Electrical and Electronic Engineering as it opened up many possibilities and interesting challenges for the reason that science and technology are the roots of many interesting scientific and technical activities. During my engineering course I was introduced to the concepts of microprocessors and micro controllers and I had taken an instant liking to these subjects.