Dynamic Characterization of High Frequency MEMS/NEMS Using Raman Spectroscopy

671 Words2 Pages

This paper proposes the development of Raman spectroscopy system which has capabilities to characterize the motion of high frequency MEMS/NEMS and devices without surface feature. Raman spectroscopy is being increasingly used as a technique to characterize such devices to overcome inconveniences of other optical measurement techniques of which include laser vibrometer, stroboscopic imaging, interferometry, electronic speckle pattern interferometry, laser holography and blur synthesis. These techniques are limited in frequency to less than 30 MHz and either requires the measurement to be performed along the line of motion or by utilizing a surface feature. A cantilever beam as the most common basic geometry of MEMS/NEMS devices structure is used to evaluate the basic dynamic parameters of a microstructure. Mode shapes of vibration, natural frequencies and strain maps for such structure within the device is determined by using analytical calculation and finite element analysis. A model of cantilever with large end mass is used to calculate strain components whilst mode shape and natura...

More about Dynamic Characterization of High Frequency MEMS/NEMS Using Raman Spectroscopy

Open Document